SEMI® E35 Example Values

This document will outline the example values that have been approved as an addendum to the SEMI® E35 cost of ownership guideline B. These and other values are used as defaults in TWO COOL® v2.1.1 and later.

This related information is not an official part of SEMI® E35 and is not intended to modify or supersede the official standard. Publication was authorized by vote of the SEMI® Metrics Committee. These values are provided only as examples. Actual values should be determined by considering company experience, specific tool characteristics, applications, process technology, product type, regional differences, and analysis objectives. Determination of the suitability of the material is solely the responsibility of the user.

Administrative Rates
Input Parameter
150 mm Example1
200 mm Example2
300 mm Example3
Fab Parameters
Engineering Usage
0
0
0
Standby Time
0
0
0
Production Tests
127
14
14
MTTT
0.31
0.25
0.3
Whole Systems
N/A
1
1
Scheduled Production
Hours/Week/Shift
42
42
42
Shifts/Week
4
4
4
Hours/Day
24
24
24
Days/Year
350
365
365
Supplier Shifts/Week
N/A
4
4
Labor and Salary Rates
Engineering
$100,000
$111,000*
$111,000
Supervision
$80,000
$111,000*
$111,000
Operator/Hour
$26
$25
$25
Maintenance/Hour
$26
$30
$30
Productivity
80%
80%
80%
Space Rates
Class 1
$360
$400
$400
Class 10
$240
$250
$250
Class 100
$100
$100
$100
Other
$50
$50
$50
Wafer Costs
Test Wafer Cost
$5.50
$100
$500
Test Wafer Reuse Times*
1
10
10
Incoming Wafer
$250
$500
$1317
Completed Wafer
$500
$1000
$2034
Depreciation Parameters
Life of Equipment Years
5
7
7
Depreciation Life Years
N/A
5
5
Salvage Value
0
0
0
Depreciation Method
Straight Line
Straight Line
Straight Line
Other Parameters
Systems/Engineer
5
10
10
Systems/Supervisor
20
30
30
Systems/Operator
2
3
3
Defect Fault Probability
0.167
0.05
0.08
Installation Cost as Percent of Equipment Cost
Lithography
N/A
N/A
8%
Metrology
N/A
N/A
5%
Other
N/A
N/A
12%
Parameters With No Example Values
Maintenance
MTBF
MTTR
Assists
Service Contracts
Training
Utilities
Materials/Consumables
Waste Disposal
Equipment Cost
Transportation
Installation
Qualification
Floor Space
Yield
Equipment Yield
Defect Density
Parametric Yield

* Revised from 1995 version
1 Derived from SEMATECH Cost of Ownership Rev. B December 1990.
2 Approved, Metrics Committee, July 11, 1995.
3 Derive from joint Selete and International 300mm Initiative (I300I) inputs, 1997.

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