TECHNICAL ALERT #4 FOR ALL USERS OF PRO COOL® v1.1 and v1.1.1

Minimum Cycle Time Report and Chart

The "Batch Time" and "Cumulative Batch Time" calculations in the minimum cycle time report and chart are in error. No other calculations on these reports and charts are impacted. The correct batch time may be manually estimated from information on the Minimum Cycle Time report using the following equations:

Wafers: Batch Time = Batch Size / Average WPH
Units: Batch Time = Batch Size / Average UPH
Masks: Batch Time = Batch Size / Average MPH

For further information on this problem, including the availability of a correction, please contact [email protected]

Techalert20-9808

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